Surface Analysis- 3D Optical Profiler
Optical profilometry is a non-contact metrology technique for surface analysis and topography characterization. The technique provides 2D and 3D images of a surface as well as numerous surface texture parameters.
Typical measurements include:
- Surface roughness
- Step hight/depth
- 3D imaging
Veeco Wyko NT9100 system and 4.1 Vision analysis software.
Surface Analysis- Auger Electron Spectroscopy (AES)
Auger electron spectroscopy is an analytical technique for elemental analysis of very thin films or small features. The information depth and lateral resolution for AES is in the order of nanometers. In combination with a sputtering ion gun, AES can also offer depth profiling. AES can be performed as point or area analysis, line scans and mappings.
- Surface cleanliness of medical implants
- Chemical analysis of thin stains
- Depth characterizations of oxide films
- Chemical analysis of small features (<1 µm)
Physical electronics (PHI) 700Xi Scanning Auger Nanoprobe.
Secondary Ion Mass Spectrometry (ToF-SIMS)
Time of flight Secondary ion mass spectrometry is a technique that provides elemental, chemical state, and molecular information from surfaces of solid materials. The detection limit in ToF-SIMS is in the ppm range which makes the technique very surface sensitive. In combination with a sputtering ion gun, ToF-SIMS can also offer depth profiling. ToF-SIMS can be performed as point or area analysis, line scans and mappings
- Analysis of different deposits
- Chemical state determinations
- Analysis of trace elements
Physical electronics (PHI) Trift II.
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