Scanning Electron Microscopy
Scanning electron microscopy (SEM) is a powerful technique for imaging features down to the nanometer range. SEM can provide topographical and compositional information and has a greater depth of field compared to conventional light optical microscopes.
- Imaging of small features
- Spatial variations in chemical composition
- Enables chemical analysis (EDX)
- Fractography, an important part in failure investigations
Zeiss FEG Ultra 55 with SE, BSE, In-Lens SE and In-Lens BSE detectors.
Electron Diffraction (EBSD)
Electron backscatter diffraction is a SEM based technique that provides crystallographic information of the microstructure in crystalline materials. EBSD can give information about crystal orientation, phases, texture, internal stresses, etc.
- Grain structure, size, orientation and distribution
- Phase identification
Oxford Instruments HKL, NordlysF.