Microscopy and Surface analysis

Imaging

  • Light Optical Microscopy (LOM), Leica DRME
  • Stereo microscopy (SLOM)
  • Scanning Electron Microscopy (SEM), Zeiss ULTRA 55
  • Image analysis, Qwin

Chemical analysis

  • Energy Dispersive X-Ray Spectrometry (EDX), Oxford PentaFETx3
  • Electron Backscatter Diffraction (EBSD),  Oxford Instruments HKL, NordlysF
  • Auger Electron Spectroscopy (AES), PHI 660
  • Secondary Ion Mass Spectrometry (ToF-SIMS), PHI TRIFT II

Surface topography

  • Interference Profilometry, Wyko NT9100